Reactive ion etcher (RIE Oxford Plasmalab 80 Plus)
Reactive Ion Etcher (RIE)
What we can offer:
Micro structure fabrication
Micro and nano structures and devices on different substrates (glass, silicon, CaF2)
Customized structured calibration and reference samples (microscopy, metrology).
Hydrophobic / hydrophilic surfaces
Cleaning of surfaces, i.e. remove organic layers, oxide layers
Activation of plastic and ceramics as pre-treatment
Surface topography modification by selective etching or roughness increase
Interesting for (with the system):
Material science, microelectronics and semiconductors, automotive, laboratory test facilities, microscopy laboratories, machine tool manufacturers, iron and steel industry...
surface treatment and structuring