Reactive Ion Etcher (RIE)
What we can offer:
Micro structure fabrication
Possibility:
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Micro and nano structures and devices on different substrates (glass, silicon, CaF2)
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Customized structured calibration and reference samples (microscopy, metrology).
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Hydrophobic / hydrophilic surfaces
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Cleaning of surfaces, i.e. remove organic layers, oxide layers
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Activation of plastic and ceramics as pre-treatment
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Surface topography modification by selective etching or roughness increase
Interesting for (with the system):
Material science, microelectronics and semiconductors, automotive, laboratory test facilities, microscopy laboratories, machine tool manufacturers, iron and steel industry...
Tags
Microstructure fabrication
microsystems
sensors
surface treatment and structuring