Spectroscopic ellipsometer
Spectroscopic ellipsometer (GES5 spectroscopic-ellipsometer SEMILAB)

What we can offer:

  • Non-destructive measurement of a wide range of layer thicknesses and material optical properties.


  • To measure optical properties at wavelengths from 230 to 900 nm.

  • To measure at different incidence angles (from 40° to 77°).

  • To perform automatic multipoint measurements using a xy sample stage movement.

  • To perform spectroscopic photometry measurements (transmittance and reflectance).

  • To extract valuable optical information by automatic comparison, using a specialized software, of the measured data to the reference data available at big data-bases.

Interesting for (with the system):

  • Material science industry, optoelectronic and optical industry, photovoltaic, semiconductors…
Layer thickness
Spectroscopic ellipsometer
optical properties
refractive index