eBeam Lithography Room
- Classification: ISO 5 and ISO 6
- Research activities: Fabrication of nanoscale structures and nanoscale imagine.
- Equipment: RAITH150TWO and Raith e-LiNE+
- Lighting: Yellow
Equipment
State-of-the-art equipment, including electron and scanning-tunneling microscopes, as well as other nanofabrication and characterization tools, are managed by specialists and used by researchers from a wide variety of fields.
Facilities & Equipment
A unique infrastructure of 6 200 m2 was set up to host a cleanroom of nearly 300m2 and 15 ultra-sensitive laboratories with state-of-the-art equipment.
