Equipment
The nanoGUNE facilities are managed by specialists and used by researchers from a wide variety of fields.
NanoGUNE's External-Services department offers a wide range of characterization and fabrication services to external users, both academic and industrial.
NanoGUNE's equipment is presented below.
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Ion Beam Etcher (4Wave) -
Quantum Design SQUID-VSM EverCool -
Quantum Design PPMS -
Magneto-Optical Kerr Effect (MOKE) set-up -
Magneto-Optical Kerr Effect (MOKE) microscope -
UHV Sputtering System (AJA Int.) -
Oerlikon - UNIVEX 350 / EPVD75 Kurt J. Lesker -
ALD Cambridge Nanotech Savannah S100 -
Leica EM MED020 / Quorum technologies Q150 T ES -
Electron-Beam Lithography (Raith -150-TWO / E-line) -
Dual-beam FIB/SEM - FEI Helios Nanolab / FEI Helios 450S -
Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments) -
X-ray reflectivity/diffractometry (X'pert PRO by PANalytical) -
High power industrial Picosecond Laser -
High-resolution Transmission Electron Microscope (HRTEM) -
Four point probe -
STM/AFM (4 K) in UHV with light detection set-up -
STM/AFM (1 K) in UHV with magnetic field -
Electrospinning -
Reactive ion etcher (RIE Oxford Plasmalab 80 Plus) -
Spectroscopic ellipsometrer (GES5 spectroscopic-ellipsometer SEMILAB) -
RAMGRABER Wet benches -
Double Pack Oven, 650ºC UNITEMP RSO-650-200 -
ALD Beneq TFS 200 -
Mask aligner (EVG) -
FTIR Spectrometer PerkinElmer Frontier -
Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250) -
FTIR Spectrometer PerkinElmer Frontier -
Scattering-type near-field microscope (NeaSpec) -
Plasma asher -
Universal mechanical tester (UMT) -
Microscopy Platform for Materials Research -
UV-NIR Spectrometry -
3D Optical Profiler -
Surface Plasmon Resonance Platform -
NIR Raman spectroscopy -
Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments) -
Spectroscopic ellipsometer (GES5 spectroscopic-ellipsometer SEMILAB) -
Scattering-type near-field microscope (Neaspec) -
CRYO Plasma FIB
Cleanroom
The nanoGUNE cleanroom, dedicated to fabricate and characterize the properties of materials on the nanoscale, ia a 300m2 laboratory where the air purity is under strict supervision.
Facilities & Equipment
A unique infrastructure of 6 200 m2 was set up to host a cleanroom of nearly 300m2 and 15 ultra-sensitive laboratories with state-of-the-art equipment.