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Specialization Areas
Nano/micro fabrication
Functional Coatings
Micro/nano fabrication
Surface structuring
Thin layers analysis
Physical/chemical characterization
Micro - nano mechanical analysis
Magnetic characterization
Chemical characterization
Surface composition analysis
Electrical characterization
Structural-morphology characterization
Surface morphology
Structural characterization
In situ electron microscopy
Micro/Nano Tomography, 3D electron microscopy
Equipment
Characterization Platform
Sample Fabrication Platform
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Sample Fabrication Platform
Sample Fabrication Platform
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Characterization platform
Sample-fabrication platform
Mask aligner (EVG)
Reactive ion etcher (RIE Oxford Plasmalab 80 Plus)
High power industrial Picosecond Laser
Electron-Beam Lithography (Raith -150-TWO / E-line)
Dual-beam FIB/SEM - FEI Helios Nanolab / FEI Helios 450S
UHV Sputtering System (AJA Int.)
Oerlikon - UNIVEX 350 / EPVD75 Kurt J. Lesker
ALD Cambridge Nanotech Savannah S100
