Nanodevices Equipment
The nanodevices group has access to nanoGUNE's common cleanroom equipment devoted to nanofabrication. In adittion, we have some equipment specially dedicated to our research lines.
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Ion Beam Etcher (4Wave)
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Quantum Design SQUID-VSM EverCool
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UHV Sputtering System (AJA Int.)
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Oerlikon - UNIVEX 350 / EPVD75 Kurt J. Lesker
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Electron-Beam Lithography (Raith -150-TWO / E-line)
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Dual-beam FIB/SEM - FEI Helios Nanolab / FEI Helios 450S
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Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments)
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X-ray reflectivity/diffractometry (X'pert PRO by PANalytical)
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Quantum Design PPMS
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Mask aligner (EVG)
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Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250)
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Reactive ion etcher (RIE Oxford Plasmalab 80 Plus)
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Four point probe