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Specialization Areas
Nano/micro fabrication
Functional Coatings
Micro/nano fabrication
Surface structuring
Thin layers analysis
Physical/chemical characterization
Micro - nano mechanical analysis
Magnetic characterization
Chemical characterization
Surface composition analysis
Electrical characterization
Structural-morphology characterization
Surface morphology
Structural characterization
In situ electron microscopy
Micro/Nano Tomography, 3D electron microscopy
Equipment
Characterization Platform
Sample Fabrication Platform
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Characterization Platform
Characterization Platform
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Characterization platform
Sample-fabrication platform
Scattering-type near-field microscope (NeaSpec)
Plasma asher
Universal mechanical tester (UMT)
Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments)
Spectroscopic ellipsometer (GES5 spectroscopic-ellipsometer SEMILAB)
FTIR Spectrometer PerkinElmer Frontier
Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250)
High-resolution Transmission Electron Microscope (HRTEM)
Four point probe
X-ray reflectivity/diffractometry (X'pert PRO by PANalytical)
Quantum Design PPMS
Dual-beam FIB/SEM - FEI Helios Nanolab / FEI Helios 450S
Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments)
